This series of products is a micro mirror array, which is a mirror array composed of micro electromechanical beam deflectors. The applicable wavelengths can range from deep ultraviolet to near-infrared (DUV to NIR, 193nm~1500nm). The mirror surface can be composed of 256 × 256 micro mirrors, each mirror surface measuring 16um * 16um. The scanning frequency can reach 1KHz. Can be used for generating graphics, programmable mask boards, etc.

Example of micro mirror array for extended spectral range
„256 x 256 micro mirrors
„ 16 μm x 16 μm mirror pitch
„ Frame rate 1 kHz
„ Analogue mirror tilting
„ Illumination wavelengths : 193 … 1500 nm

Applications
„Pattern projection (real time grey levels)
„ Programmable masks
„ Structured / programmable illumination